Purge Mods - List of Manufacturers, Suppliers, Companies and Products

FOURP Road Port N2 Purge Modification

A kit has been developed to modify the current FOUP load port for N2 purge functionality within 8 hours. There have been 3,000 units delivered.

Three types of purge: 1. Purge during loading 2. Purge during opening 3. Purge during unloading

• Company：トリコ 東京支店
• Price：Other

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• Other semiconductor manufacturing equipment
• Semiconductor inspection/test equipment