FOURP Road Port N2 Purge Modification
A kit has been developed to modify the current FOUP load port for N2 purge functionality within 8 hours. There have been 3,000 units delivered.
Three types of purge: 1. Purge during loading 2. Purge during opening 3. Purge during unloading
- 企業：トリコ 東京支店
- 価格：Other
